Sistemụ Sputtering Inline
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Inline Magnetron sputtering sistemụ
Inline Magnetron Sputtering Sistemu bụ ụdị agụụ ihe ntinye ihe nkiri dị mkpa nke na-arụ ọrụ maka ebumnuche dị iche iche.Ngwa kachasị ewu ewu nke ahịrị sputtering anyị gụnyere:
Aluminom mirror imepụta
- ITO iko mkpuchi
- Igo ihe mgbochi
- Ihe mkpuchi ịchọ mma maka igwe anaghị agba nchara na iko
Usoro mkpuchi a dabara adaba maka ngwa mkpuchi oghere dị elu.Ọ na-arụpụta arụmọrụ ọrụ kwụsiri ike iji melite ogo ihe nkiri mkpuchi agụụ.
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ITO Glass Magnetron sputtering Line mkpuchi
ITO Glass Magnetron sputtering mkpuchi Line na-anabata teknụzụ ikuku magnetron na teknụzụ na-agbasaghị magnetron iji kpuchie iko sere n'elu na akwa SO2/ITO.Dabere na usoro njikwa elu mba ụwa.Usoro nrụpụta dum na-arụ ọrụ na-akpaghị aka na-aga n'ihu.
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Aluminium Mirror Inline Magnetron Sputtering Line
Aluminom mirror inline Magnetron sputtering Line e mere maka elu mmepụta nke iko mirror n'ichepụta nzube.Iji kpuchie nnukwu iko ma lekọta panel nke iko na-adịghị emebi emebi, ọkachasị maka mpempe akwụkwọ buru ibu, anyị na-eme ụdị ahịrị kwụ ọtọ.Ọ bụ ahịrị mkpuchi magnetron na-aga n'ihu, nke nwere ụlọ ịgbapụta n'ihu na azụ siri ike, yana mgbe ụlọ ntughari, tupu na mgbe ọmarịcha ụlọ na-agbapụta nke ọma, ụlọ nchekwa ihe, ime ụlọ agba agba.
Ebumnuche d esign: cylindrical magnetron sputtering cathodes ma ọ bụ/na planar cathodes.
Isi iyi ike: ọkụ ọkụ nwere ike dị elu DC ma ọ bụ MF magnetron sputtering
Sistemụ ịnya ụgbọ ala: draịva rola, enwere ike ịmegharị ugboro ole, sistemu oghere ime ụlọ ụdị induction.
Sistemụ agụụ: mgbapụta mgbapụta (ma ọ bụ turbo molecular pump) + mgbọrọgwụ mgbapụta + igwe mgbapụta
