Aluminom mirror inline Magnetron sputtering Line e mere maka elu mmepụta nke iko mirror n'ichepụta nzube.Iji kpuchie nnukwu iko ma lekọta panel nke iko na-adịghị emebi emebi, ọkachasị maka mpempe akwụkwọ buru ibu, anyị na-eme ụdị ahịrị kwụ ọtọ.Ọ bụ ahịrị mkpuchi magnetron na-aga n'ihu, nke nwere ụlọ ịgbapụta n'ihu na azụ siri ike, yana mgbe ụlọ ntughari, tupu na mgbe ọmarịcha ụlọ na-agbapụta nke ọma, ụlọ nchekwa ihe, ime ụlọ agba agba.
Ebumnuche d esign: cylindrical magnetron sputtering cathodes ma ọ bụ/na planar cathodes.
Isi iyi ike: ọkụ ọkụ nwere ike dị elu DC ma ọ bụ MF magnetron sputtering
Sistemụ ịnya ụgbọ ala: draịva rola, enwere ike ịmegharị ugboro ole, sistemu oghere ime ụlọ ụdị induction.
Sistemụ agụụ: mgbapụta mgbapụta (ma ọ bụ turbo molecular pump) + mgbọrọgwụ mgbapụta + igwe mgbapụta
Aluminom mirror inline Magnetron sputtering Line na-abịakarị na ọtụtụ oghere oghere iji mechaa mkpuchi agụụ na mpempe iko.
Isi atụmatụ:
1.Max.glass mkpuchi nha: 2440x3660mm ma ọ bụ ahaziri
2. Ụlọ ndị na-ekpo ọkụ na-ekpo ọkụ na ọtụtụ ihe na-eme ka ụlọ dị iche iche dị
3. Akara akara magnetik kwụ ọtọ nwere otu njedebe na njedebe abụọ;iko okpukpu abụọ ihicha, mkpuchi, nchọpụta, eserese, ihicha, jụrụ oyi nwere ike mechaa niile n'otu oge
4. The sputtering mkpuchi ahịrị na-eji PLC maka dum usoro akara na-onwem na agba ihuenyo na-egosi mkpuchi usoro data.
Layer nke mkpuchi: Titanium, Chrome, igwe anaghị agba nchara, Aluminom, Silver, Copper, wdg.
Ngwakọta: TiN, TiO2, wdg.
Ọkpụrụkpụ oyi akwa: 5-100nm
Mbufe: 8-40% na 380-780 nm ogologo ebili mmiri
Ọnọdụ nkwụnye ego: okpomọkụ ụlọ
Nrụgide kachasị mgbe awa 8 gbadata:
Ụlọ mkpọchi ntinye & ọnụ ụlọ mkpọchi oghere: 5 × 10-1 Pa ma ọ bụ n'okpuru
Ụlọ nchekwa 1: 3 × 10-3 Pa ma ọ bụ n'okpuru
Ụlọ ịgbasa: 2 × 10-3 Pa ma ọ bụ n'okpuru
Ụlọ nchekwa 2: 3 × 10-3 Pa ma ọ bụ n'okpuru
Ụlọ mkpọchi ụzọ ọpụpụ & ọnụ ụlọ mkpọchi oghere: 5 × 10-1 Pa ma ọ bụ n'okpuru