Inline Magnetron sputtering sistemụ
Inline magnetron sputtering mkpuchi igwe bụ tumadi DC (ma ọ bụ MF) magnetron sputtering mkpuchi nwere ike imeghari ka a dịgasị iche iche nke lekwasịrị anya, dị ka: ọla kọpa, titanium, chromium, igwe anaghị agba nchara, nickel na ndị ọzọ metal ihe nwere ike ntekwasa site na iji sputtering usoro. nwere ike imeziwanye ihe nkiri adhesion, reproducibility, density, uniformity and other characters.
- a.The isi e ji mara na parameters
- b.kehoraizin akara Ọdịdị nwere ike ghọtara n'out oge ntekwasa n'otu akụkụ
- c.arụmọrụ mmepụta, ọsọ ọsọ ọsọ ruo 1 min / iti
- d.modular imewe, mfe mmezi
- e.plating usoro ntozu okè, elu mkpụrụ
- f.DC magnetron sputtering cathodes nwere ike ịdị iche dabere na ndị ahịa chọrọ
- g.Sistemụ agụụ nwere igwe mgbapụta, nfuli mgbọrọgwụ, nfuli mgbasa ozi (mgbapụta molekụla) mejupụtara
- h.Ogo ahụ ahịrị nwere ike ịdị iche dabere na ihe ndị ahịa chọrọ
- 1) The agụụ ụlọ ahụ ihe eji SUS304, polishing a agụụ ụlọ ọgwụgwọ mgbidi, mpụta mgbidi ịgba polishing beads nhazi.
- 2) Iji valvụ ọnụ ụzọ ámá nọọrọ onwe ya n'etiti oghere oghere - valvụ flapper iche, nwere ike ebipụ nke ọma, mee ka gas usoro ahụ guzosie ike.Ka ọ dị ugbu a, ụlọ ọrụ anyị na-anakwere valvụ flapper, ọ na-emechi nke ọma, na-adịgide adịgide karịa valvụ flap nkịtị nke ụlọ ugbu a.
- 3) Nbufe na-eji ntuziaka magnetik, chebe nkwụsi ike nke mbanye.Maka ọsọ ọ bụla nke ahịrị mmepụta dum na-eji VVVF moto mbanye, enwere ike gbanwee ọsọ ọsọ.
- 4) Sistemụ Njikwa eletriki: ihuenyo mmetụ na njikwa akpaka PLC, mkparịta ụka igwe mmadụ iji nweta sistemụ ngosipụta data, paramita arụ ọrụ na teknụzụ njikwa.
- 1) Nrụgide oghere kacha elu: 6 × 1 0E-4 Pa
- 2) nkezi mmepụta okirikiri: dị ka ngwaahịa kpebisiri ike
- 3) The substrate njide Size: nwere ike ahaziri dị ka chọrọ nke
- 4) Ịdị n'otu ihe nkiri: ± 3% teknụzụ ubi mkpanaka dị elu emeela ka itinye n'ọrụ ebumnuche dị elu
- Nhazi ikpo ọkụ nke nkewa na-enyere aka ịhazi njikarịcha.
Dee ozi gị ebe a ziga anyị ya
